Abstract
This paper describes a means for producing single-and multiple-helical microcoils by using microcontact printing to print lines on cylinders. This method was used to fabricate coils made of wires with widths and spaces between 150-25 μm wrapped around cylinders with diameters between 100-400 μm. Results show that microelectromagnets using these microcoils produce magnetic flux densities in excess of 0.4 T and can be switched on and off on a submillisecond time scale.
Original language | English (US) |
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Pages (from-to) | 184-191 |
Number of pages | 8 |
Journal | Journal of Microelectromechanical Systems |
Volume | 6 |
Issue number | 3 |
DOIs | |
State | Published - Sep 1997 |
Keywords
- Coils
- Electromagnets
- Fabrication
- Ferromagnetic materials/devices
- Inductors
- Microelectromechanical devices
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering