Keyphrases
Cubic Boron Nitride Film
100%
Turbostratic Boron Nitride
100%
Cubic Boron Nitride (c-BN)
75%
Stress Level
50%
Internal Stress
50%
Transmission Electron Microscopy
25%
Stoichiometry
25%
Stress Concentration
25%
Microstructure
25%
Electron Microscopy Studies
25%
Film Growth
25%
Substrate Bias
25%
Deposition Conditions
25%
Phase Concentration
25%
Radio Frequency Magnetron Sputtering
25%
Material Science
Nucleation
100%
Cubic Boron Nitride
100%
Film
100%
Boron Nitride
66%
Magnetron Sputtering
16%
Transmission Electron Microscopy
16%
Film Growth
16%
Chemical Engineering
Cubic Boron Nitride
100%
Film
100%
Boron Nitride
66%
Magnetron Sputtering
16%