Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

Melville P. Ulmer; Rocco Coppejans; David B. Buchholz; Jian Cao; Xiaoli Wang; Alejandro M. Mercado; Jun Qian; Lahsen Assoufid; Allison E. O'Donnell; Kyle S. Condron; Benjamin E. Harpt

doi:10.1117/12.2274210

Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

Melville P. Ulmer^*, Rocco Coppejans, David B. Buchholz, Jian Cao, Xiaoli Wang, Alejandro M. Mercado, Jun Qian, Lahsen Assoufid, Allison E. O'Donnell, Kyle S. Condron, Benjamin E. Harpt

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

We describe our progress in developing a method for correcting residual figure errors in X-ray mirrors. The technology has applications to both synchrotron radiation beamlines and X-ray astronomy. Our concept is to develop mirrors that are on the order of a millimeter thick. A magnetic smart material (MSM) is deposited onto the mirror substrate (silicon) and coated with a magnetically hard material. The shape of the mirror can be controlled by applying an external magnetic field to the mirror. This causes the MSM to expand or contract, thereby applying a magnetostrictive stress to the mirror and changing its shape. The shape change is maintained after the field has been removed by the magnetic hard material, which retains part of the field and prevents the MSM from relaxing. Here we present the results of shaping 200 μm thick silicon (100) 14 × 2 mm cantilevers and 50 × 50 × 0.1 mm substrates. We demonstrate that not only can a sizable deflection be created, but it can also be retained for â1/4 60 hours.

Original language	English (US)
Title of host publication	Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
Editors	Stephen L. O'Dell, Giovanni Pareschi
Publisher	SPIE
ISBN (Electronic)	9781510612556
DOIs	https://doi.org/10.1117/12.2274210
State	Published - 2017
Event	Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII 2017 - San Diego, United States Duration: Aug 8 2017 → Aug 10 2017

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10399
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII 2017
Country/Territory	United States
City	San Diego
Period	8/8/17 → 8/10/17

Funding

This work was supported primarily by an adaptive X-ray optics NASA (Grant NNX16AL31G) plus support from a NASA NIAC grant (NX15AL89G). AM thanks Drs. Nikita Strelnikov and Issac Vasserman for help provided in making the magnetic field measurements at the APS. The authors would like to thank Dr. Peter Takacs, Dr. Ron Shiri and Dr. William W. Zhang for advice and support. We thank Giovanni Pareschi for suggesting working with MSM films in the first place. We thank D. L. Coppejans for her help in editing the manuscript. We also thank the ISEN center at Northwestern University for providing funds for purchasing additional sputtering guns that were used for a portion of the coating work done here. This work made use of the EPIC facility of Northwestern Universitys NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program (NSF DMR-1121262) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN. We thank Yip-Wah Chung for advice on coating, materials, and magnetics. Work done by Argonne National Laboratory was supported by US Department of Energy, Office of Science, Office of Basic Energy Sciences under Contract No.DE-AC02-06CH11357. B.H. was supported by an Illinois Space Grant summer research scholarship and A.O. was supported both by an Illinois Space Grant summer research scholarship and a Northwestern University Undergraduate Research grant.

Keywords

X-ray optics
grazing incidence optics
magnetic smart materials

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Ulmer, M. P., Coppejans, R., Buchholz, D. B., Cao, J., Wang, X., Mercado, A. M., Qian, J., Assoufid, L., O'Donnell, A. E., Condron, K. S., & Harpt, B. E. (2017). Controlling the shapes of coated silicon substrates via magnetic fields, a progress report. In S. L. O'Dell, & G. Pareschi (Eds.), Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII Article 103991N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10399). SPIE. https://doi.org/10.1117/12.2274210

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title = "Controlling the shapes of coated silicon substrates via magnetic fields, a progress report",

abstract = "We describe our progress in developing a method for correcting residual figure errors in X-ray mirrors. The technology has applications to both synchrotron radiation beamlines and X-ray astronomy. Our concept is to develop mirrors that are on the order of a millimeter thick. A magnetic smart material (MSM) is deposited onto the mirror substrate (silicon) and coated with a magnetically hard material. The shape of the mirror can be controlled by applying an external magnetic field to the mirror. This causes the MSM to expand or contract, thereby applying a magnetostrictive stress to the mirror and changing its shape. The shape change is maintained after the field has been removed by the magnetic hard material, which retains part of the field and prevents the MSM from relaxing. Here we present the results of shaping 200 μm thick silicon (100) 14 × 2 mm cantilevers and 50 × 50 × 0.1 mm substrates. We demonstrate that not only can a sizable deflection be created, but it can also be retained for {\^a}1/4 60 hours.",

keywords = "X-ray optics, grazing incidence optics, magnetic smart materials",

author = "Ulmer, {Melville P.} and Rocco Coppejans and Buchholz, {David B.} and Jian Cao and Xiaoli Wang and Mercado, {Alejandro M.} and Jun Qian and Lahsen Assoufid and O'Donnell, {Allison E.} and Condron, {Kyle S.} and Harpt, {Benjamin E.}",

note = "Publisher Copyright: {\textcopyright} 2017 SPIE.; Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII 2017 ; Conference date: 08-08-2017 Through 10-08-2017",

year = "2017",

doi = "10.1117/12.2274210",

language = "English (US)",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

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Ulmer, MP, Coppejans, R, Buchholz, DB, Cao, J, Wang, X, Mercado, AM, Qian, J, Assoufid, L, O'Donnell, AE, Condron, KS & Harpt, BE 2017, Controlling the shapes of coated silicon substrates via magnetic fields, a progress report. in SL O'Dell & G Pareschi (eds), Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII., 103991N, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10399, SPIE, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII 2017, San Diego, United States, 8/8/17. https://doi.org/10.1117/12.2274210

Controlling the shapes of coated silicon substrates via magnetic fields, a progress report. / Ulmer, Melville P.; Coppejans, Rocco; Buchholz, David B. et al.
Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII. ed. / Stephen L. O'Dell; Giovanni Pareschi. SPIE, 2017. 103991N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10399).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

AU - Ulmer, Melville P.

AU - Coppejans, Rocco

AU - Buchholz, David B.

AU - Cao, Jian

AU - Wang, Xiaoli

AU - Mercado, Alejandro M.

AU - Qian, Jun

AU - Assoufid, Lahsen

AU - O'Donnell, Allison E.

AU - Condron, Kyle S.

AU - Harpt, Benjamin E.

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N2 - We describe our progress in developing a method for correcting residual figure errors in X-ray mirrors. The technology has applications to both synchrotron radiation beamlines and X-ray astronomy. Our concept is to develop mirrors that are on the order of a millimeter thick. A magnetic smart material (MSM) is deposited onto the mirror substrate (silicon) and coated with a magnetically hard material. The shape of the mirror can be controlled by applying an external magnetic field to the mirror. This causes the MSM to expand or contract, thereby applying a magnetostrictive stress to the mirror and changing its shape. The shape change is maintained after the field has been removed by the magnetic hard material, which retains part of the field and prevents the MSM from relaxing. Here we present the results of shaping 200 μm thick silicon (100) 14 × 2 mm cantilevers and 50 × 50 × 0.1 mm substrates. We demonstrate that not only can a sizable deflection be created, but it can also be retained for â1/4 60 hours.

AB - We describe our progress in developing a method for correcting residual figure errors in X-ray mirrors. The technology has applications to both synchrotron radiation beamlines and X-ray astronomy. Our concept is to develop mirrors that are on the order of a millimeter thick. A magnetic smart material (MSM) is deposited onto the mirror substrate (silicon) and coated with a magnetically hard material. The shape of the mirror can be controlled by applying an external magnetic field to the mirror. This causes the MSM to expand or contract, thereby applying a magnetostrictive stress to the mirror and changing its shape. The shape change is maintained after the field has been removed by the magnetic hard material, which retains part of the field and prevents the MSM from relaxing. Here we present the results of shaping 200 μm thick silicon (100) 14 × 2 mm cantilevers and 50 × 50 × 0.1 mm substrates. We demonstrate that not only can a sizable deflection be created, but it can also be retained for â1/4 60 hours.

KW - X-ray optics

KW - grazing incidence optics

KW - magnetic smart materials

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII

A2 - O'Dell, Stephen L.

A2 - Pareschi, Giovanni

PB - SPIE

T2 - Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII 2017

Y2 - 8 August 2017 through 10 August 2017

ER -

Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

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