Coordination chemistry routes to films for superconducting electronics

Tobin J. Marks*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

74 Scopus citations


This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.

Original languageEnglish (US)
Pages (from-to)313-318
Number of pages6
JournalPure and Applied Chemistry
Issue number2
StatePublished - Jan 1 1995

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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