Correcting for spherical aberrations in solid immersion microscopy using a deformable mirror

Y. Lu*, E. Ramsay, C. Stockbridge, F. H. Koklu, A. Yurt, J. Mertz, T. G. Bifano, M. S. Ünlü, B. B. Goldberg

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.

Original languageEnglish (US)
Title of host publicationISTFA 2011 - Conference Proceedings from the 37th International Symposium for Testing and Failure Analysis
Pages26-30
Number of pages5
StatePublished - Dec 1 2011
Event37th International Symposium for Testing and Failure Analysis, ISTFA 2011 - San Jose, CA, United States
Duration: Nov 13 2011Nov 17 2011

Other

Other37th International Symposium for Testing and Failure Analysis, ISTFA 2011
CountryUnited States
CitySan Jose, CA
Period11/13/1111/17/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

Fingerprint Dive into the research topics of 'Correcting for spherical aberrations in solid immersion microscopy using a deformable mirror'. Together they form a unique fingerprint.

Cite this