Correlation between x-ray diffraction patterns and strain distribution inside GaInP/GaAs superlattices

X. G. He*, M. Erdtmann, R. Williams, S. Kim, M. Razeghi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Strong correlation between x-ray diffraction characteristics and strain distribution inside GaInP/GaAs superlattices has been reported. It is found that the symmetry of (002) diffraction patterns can be used to evaluate the interface strain status. A sample with no interfacial strains has a symmetric (002) diffraction pattern and weak (004) diffraction pattern. It is also demonstrated that strain distribution in superlattices can be readily estimated qualitatively by analyzing x-ray diffraction patterns.

Original languageEnglish (US)
Pages (from-to)2812-2814
Number of pages3
JournalApplied Physics Letters
Volume65
Issue number22
DOIs
StatePublished - 1994

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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