Creating femtosecond-laser-hyperdoped silicon with a homogeneous doping profile

Yu Ting Lin, Niall Mangan, Sophie Marbach, Tobias M. Schneider, Guoliang Deng, Shouhuan Zhou, Michael P. Brenner, Eric Mazur

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Femtosecond-laser hyperdoping of sulfur in silicon typically produces a concentration gradient that results in undesirable inhomogeneous material properties. Using a mathematical model of the doping process, we design a fabrication method consisting of a sequence of laser pulses with varying sulfur concentrations in the atmosphere, which produces hyperdoped silicon with a uniform concentration depth profile. Our measurements of the evolution of the concentration profiles with each laser pulse are consistent with our mathematical model of the doping mechanism, based on classical heat and solute diffusion coupled to the far-from-equilibrium dopant incorporation. The use of optimization methods opens an avenue for creating controllable hyperdoped materials on demand.

Original languageEnglish (US)
Article number062105
JournalApplied Physics Letters
Issue number6
StatePublished - Feb 9 2015

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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