Cross-sectional elastic imaging and mechanical defect detection in low-k dielectrics in integrated circuit interconnect test structures

L. Muthuswami*, E. S. Moyer, Z. Li, E. Thompson, Kathleen Dunn, A. Victoria, G. S. Shekhawat, R. E. Geer

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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