Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography

INIS

• probes 100%
• deformation 100%
• surfaces 66%
• compression 66%
• scaling laws 66%
• resolution 33%
• mechanical properties 33%
• cost 33%
• comparative evaluations 33%
• energy 33%
• morphology 33%
• shape 33%
• architecture 33%
• substrates 33%
• distance 33%
• increasing 33%
• width 33%
• thickness 33%

Engineering

• Deformation 100%
• Microscale 33%
• Contact Surface 33%
• High Resolution 33%
• Throughput 33%
• Printing Process 33%
• Experiments 33%
• Mechanical Properties 33%
• Surfaces 33%
• Models 33%
• Demonstrates 33%
• Determines 33%
• Energy Engineering 33%
• Architecture 33%
• Substrates 33%
• Thickness 33%
• Deviation 33%

Material Science

• Scanning Probe Lithography 100%
• Mechanical Property 66%
• Surface 66%
• Nanopatterning 33%
• Material 33%
• Morphology 33%