Depolarization sensitive optical inspection of semiconductor integrated circuits

A. Yurt*, M. D W Grogan, M. S. Ünlü, B. B. Goldberg

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate dark-field, through-silicon imaging of semiconductor integrated circuits by exploiting depolarization-sensitive, high aperture angle reflectivity.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationApplications and Technology, CLEO-AT 2015
PublisherOptical Society of America (OSA)
ISBN (Electronic)9781557529688
DOIs
StatePublished - Jan 1 2015
EventCLEO: Applications and Technology, CLEO-AT 2015 - San Jose, United States
Duration: May 10 2015May 15 2015

Other

OtherCLEO: Applications and Technology, CLEO-AT 2015
CountryUnited States
CitySan Jose
Period5/10/155/15/15

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Yurt, A., Grogan, M. D. W., Ünlü, M. S., & Goldberg, B. B. (2015). Depolarization sensitive optical inspection of semiconductor integrated circuits. In CLEO: Applications and Technology, CLEO-AT 2015 [ATh1K.5] Optical Society of America (OSA). https://doi.org/10.1364/CLEO_AT.2015.ATh1K.5