Keyphrases
3Y-ZrO2
100%
Cubic Fluorite
25%
Deposit Properties
100%
Deposition Rate
25%
Direct Current Power
25%
Electron Microscopy Studies
25%
Feedback Control
25%
Fluorite Structure
25%
Hardening Hypothesis
25%
Hardness Results
25%
High Temperature
25%
Ion Bombardment
25%
Layer Thickness
25%
Mechanical Properties
100%
Metallic Target
25%
Monoclinic Structure
25%
Nanoindentation Hardness
25%
O2 Partial Pressure
25%
Pulsed Direct Current
25%
Pure Metals
25%
Radio Frequency Power
25%
Reactive Magnetron Sputtering
25%
Superlattice
100%
Superlattices
100%
Target Voltage
25%
Transmission Electron Microscopy
25%
Well-defined
25%
X Ray Diffraction
25%
X-ray Transmission
25%
Y2O3 Layer
50%
ZrO2 Layer
50%
Engineering
Deposition Rate
20%
Direct Current
20%
Feedback Control
20%
Growing Film
20%
Ion Implantation
20%
Layer Superlattice
20%
Layer Thickness
20%
Magnetron
20%
Monoclinic
20%
Partial Pressure
20%
Polycrystalline
100%
Radio Frequency
20%
Ray Diffraction
20%
Superlattice
100%
Thin Films
20%
Material Science
Cathode
16%
Film Growth
16%
Ion Bombardment
16%
Magnetron Sputtering
16%
Nanoindentation
16%
Superlattice
100%
Thin Films
16%
Transmission Electron Microscopy
16%
X-Ray Diffraction
16%
Zirconia
100%