Deposition and mechanical properties of polycrystalline Y₂O₃/ZrO₂ superlattices

Engineering

• Deposition Rate 33%
• Direct Current 33%
• Feedback Control Systems 33%
• Growing Film 33%
• Ion Implantation 33%
• Layer Superlattice 33%
• Layer Thickness 33%
• Magnetron 33%
• Monoclinic 33%
• Partial Pressure 33%
• Polycrystalline 100%
• Radio Frequency 33%
• Ray Diffraction 33%
• Superlattice 100%
• Thin Films 33%
• Transmissions 33%

Material Science

• Cathode 16%
• Film Growth 16%
• Ion Implantation 16%
• Magnetron Sputtering 16%
• Nanoindentation 16%
• Superlattice 100%
• Thin Films 16%
• Transmission Electron Microscopy 16%
• X-Ray Diffraction 16%
• Zirconia 100%

Keyphrases

• 3Y-ZrO2 100%
• Direct Current Power 25%
• Hardening Hypothesis 25%
• Metallic Target 25%
• Pulsed Direct Current 25%
• Target Voltage 25%
• Y2O3 Layer 50%