Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods

Edgar D. Goluch; Kashan A. Shaikh; Kee Suk Ryu; Jack Chen; Jonathan M. Engel; Chang Liu

Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods

Edgar D. Goluch, Kashan A. Shaikh, Kee Suk Ryu, Jack Chen, Jonathan M. Engel, Chang Liu^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper, we present a microfluidic technique that overcomes many of the limitations currently faced by photolithography-based approaches. In-situ deposition can be used to produce precision patterns of thin-film materials (silver, gold, photoresist) on various substrates with a broad range of shapes, sizes, and curvatures in a rapid and straightforward manner. The surface profile, mechanical gauge factor, and temperature coefficient of resistance for silver films has been characterized. We also demonstrate, as applications of the method, the fabrication of strain gauges and hot-wire flow sensors.

Original language	English (US)
Title of host publication	Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
Subtitle of host publication	9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Publisher	Transducer Research Foundation
Pages	948-950
Number of pages	3
Volume	1
ISBN (Print)	0974361119, 9780974361116
State	Published - Jan 1 2005
Event	9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States Duration: Oct 9 2005 → Oct 13 2005

Other

Other	9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
Country/Territory	United States
City	Boston, MA
Period	10/9/05 → 10/13/05

Keywords

Curved surfaces
Microfluidic patterning
Sensors
Thin-film metals

ASJC Scopus subject areas

Chemical Engineering (miscellaneous)
Bioengineering

Cite this

Goluch, E. D., Shaikh, K. A., Ryu, K. S., Chen, J., Engel, J. M., & Liu, C. (2005). Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods. In Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (Vol. 1, pp. 948-950). Transducer Research Foundation.

Goluch, Edgar D. ; Shaikh, Kashan A. ; Ryu, Kee Suk et al. / Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods. Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Vol. 1 Transducer Research Foundation, 2005. pp. 948-950

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title = "Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods",

abstract = "In this paper, we present a microfluidic technique that overcomes many of the limitations currently faced by photolithography-based approaches. In-situ deposition can be used to produce precision patterns of thin-film materials (silver, gold, photoresist) on various substrates with a broad range of shapes, sizes, and curvatures in a rapid and straightforward manner. The surface profile, mechanical gauge factor, and temperature coefficient of resistance for silver films has been characterized. We also demonstrate, as applications of the method, the fabrication of strain gauges and hot-wire flow sensors.",

keywords = "Curved surfaces, Microfluidic patterning, Sensors, Thin-film metals",

author = "Goluch, {Edgar D.} and Shaikh, {Kashan A.} and Ryu, {Kee Suk} and Jack Chen and Engel, {Jonathan M.} and Chang Liu",

year = "2005",

month = jan,

day = "1",

language = "English (US)",

isbn = "0974361119",

volume = "1",

pages = "948--950",

booktitle = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference",

publisher = "Transducer Research Foundation",

note = "9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 ; Conference date: 09-10-2005 Through 13-10-2005",

}

Goluch, ED, Shaikh, KA, Ryu, KS, Chen, J, Engel, JM & Liu, C 2005, Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods. in Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. vol. 1, Transducer Research Foundation, pp. 948-950, 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005, Boston, MA, United States, 10/9/05.

Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods. / Goluch, Edgar D.; Shaikh, Kashan A.; Ryu, Kee Suk et al.
Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Vol. 1 Transducer Research Foundation, 2005. p. 948-950.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods

AU - Goluch, Edgar D.

AU - Shaikh, Kashan A.

AU - Ryu, Kee Suk

AU - Chen, Jack

AU - Engel, Jonathan M.

AU - Liu, Chang

PY - 2005/1/1

Y1 - 2005/1/1

N2 - In this paper, we present a microfluidic technique that overcomes many of the limitations currently faced by photolithography-based approaches. In-situ deposition can be used to produce precision patterns of thin-film materials (silver, gold, photoresist) on various substrates with a broad range of shapes, sizes, and curvatures in a rapid and straightforward manner. The surface profile, mechanical gauge factor, and temperature coefficient of resistance for silver films has been characterized. We also demonstrate, as applications of the method, the fabrication of strain gauges and hot-wire flow sensors.

AB - In this paper, we present a microfluidic technique that overcomes many of the limitations currently faced by photolithography-based approaches. In-situ deposition can be used to produce precision patterns of thin-film materials (silver, gold, photoresist) on various substrates with a broad range of shapes, sizes, and curvatures in a rapid and straightforward manner. The surface profile, mechanical gauge factor, and temperature coefficient of resistance for silver films has been characterized. We also demonstrate, as applications of the method, the fabrication of strain gauges and hot-wire flow sensors.

KW - Curved surfaces

KW - Microfluidic patterning

KW - Sensors

KW - Thin-film metals

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M3 - Conference contribution

AN - SCOPUS:79751517131

SN - 0974361119

SN - 9780974361116

VL - 1

SP - 948

EP - 950

BT - Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference

PB - Transducer Research Foundation

T2 - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005

Y2 - 9 October 2005 through 13 October 2005

ER -

Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods

Abstract

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Keywords

ASJC Scopus subject areas

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