Deposition and patterning of thin-film materials on curved surfaces using microfluidic methods

Edgar D. Goluch, Kashan A. Shaikh, Kee Suk Ryu, Jack Chen, Jonathan M. Engel, Chang Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, we present a microfluidic technique that overcomes many of the limitations currently faced by photolithography-based approaches. In-situ deposition can be used to produce precision patterns of thin-film materials (silver, gold, photoresist) on various substrates with a broad range of shapes, sizes, and curvatures in a rapid and straightforward manner. The surface profile, mechanical gauge factor, and temperature coefficient of resistance for silver films has been characterized. We also demonstrate, as applications of the method, the fabrication of strain gauges and hot-wire flow sensors.

Original languageEnglish (US)
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
Subtitle of host publication9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherTransducer Research Foundation
Pages948-950
Number of pages3
Volume1
ISBN (Print)0974361119, 9780974361116
StatePublished - Jan 1 2005
Event9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States
Duration: Oct 9 2005Oct 13 2005

Other

Other9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
CountryUnited States
CityBoston, MA
Period10/9/0510/13/05

Keywords

  • Curved surfaces
  • Microfluidic patterning
  • Sensors
  • Thin-film metals

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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