Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO4) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation

Fulin Xiong; M. Hagerman; H. Zhou; V. Kozhevnikov; G. K. Wong; Kenneth Poeppelmeier; John B Ketterson; R P H Chang

doi:10.1116/1.579335

Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO₄) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation

Fulin Xiong, M. Hagerman, H. Zhou, V. Kozhevnikov, G. K. Wong, Kenneth Poeppelmeier, John B Ketterson, R P H Chang

Research output: Contribution to journal › Article

4 Scopus citations

Abstract

Nonlinear optical films of potassium titanyl phosphate (KTiOP0⁴, or KTP) have been, for the first time, fabricated by pulsed excimer laser deposition on several substrates such as sapphire, Si(100) crystals, and fused quartz slides. The properties of the deposited KTP films, such as the chemical stoichiometry, crystallinity, effective index of refraction, and Raman response, have been extensively characterized. All of the results match the values of KTP crystals. The nonlinear optical property of the second harmonic generation of the films has been evaluated, showing a highefficiency comparable to a bulk value of KTP crystals. It is suggested that the success of this deposition relies on thetransient congruent process generated by a pulsed UV laser beam.

Original language	English (US)
Pages (from-to)	1446-1450
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	12
Issue number	4
DOIs	https://doi.org/10.1116/1.579335
State	Published - Jan 1 1994

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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Xiong, F., Hagerman, M., Zhou, H., Kozhevnikov, V., Wong, G. K., Poeppelmeier, K., Ketterson, J. B., & Chang, R. P. H. (1994). Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO₄) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 12(4), 1446-1450. https://doi.org/10.1116/1.579335

Xiong, Fulin ; Hagerman, M. ; Zhou, H. ; Kozhevnikov, V. ; Wong, G. K. ; Poeppelmeier, Kenneth ; Ketterson, John B ; Chang, R P H. / Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO₄) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1994 ; Vol. 12, No. 4. pp. 1446-1450.

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title = "Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO4) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation",

abstract = "Nonlinear optical films of potassium titanyl phosphate (KTiOP04, or KTP) have been, for the first time, fabricated by pulsed excimer laser deposition on several substrates such as sapphire, Si(100) crystals, and fused quartz slides. The properties of the deposited KTP films, such as the chemical stoichiometry, crystallinity, effective index of refraction, and Raman response, have been extensively characterized. All of the results match the values of KTP crystals. The nonlinear optical property of the second harmonic generation of the films has been evaluated, showing a highefficiency comparable to a bulk value of KTP crystals. It is suggested that the success of this deposition relies on thetransient congruent process generated by a pulsed UV laser beam.",

author = "Fulin Xiong and M. Hagerman and H. Zhou and V. Kozhevnikov and Wong, {G. K.} and Kenneth Poeppelmeier and Ketterson, {John B} and Chang, {R P H}",

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Xiong, F, Hagerman, M, Zhou, H, Kozhevnikov, V, Wong, GK, Poeppelmeier, K , Ketterson, JB & Chang, RPH 1994, 'Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO₄) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 12, no. 4, pp. 1446-1450. https://doi.org/10.1116/1.579335

Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO₄) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation. / Xiong, Fulin; Hagerman, M.; Zhou, H.; Kozhevnikov, V.; Wong, G. K.; Poeppelmeier, Kenneth ; Ketterson, John B ; Chang, R P H.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 12, No. 4, 01.01.1994, p. 1446-1450.

Research output: Contribution to journal › Article

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T1 - Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO4) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation

AU - Xiong, Fulin

AU - Hagerman, M.

AU - Zhou, H.

AU - Kozhevnikov, V.

AU - Wong, G. K.

AU - Poeppelmeier, Kenneth

AU - Ketterson, John B

AU - Chang, R P H

PY - 1994/1/1

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N2 - Nonlinear optical films of potassium titanyl phosphate (KTiOP04, or KTP) have been, for the first time, fabricated by pulsed excimer laser deposition on several substrates such as sapphire, Si(100) crystals, and fused quartz slides. The properties of the deposited KTP films, such as the chemical stoichiometry, crystallinity, effective index of refraction, and Raman response, have been extensively characterized. All of the results match the values of KTP crystals. The nonlinear optical property of the second harmonic generation of the films has been evaluated, showing a highefficiency comparable to a bulk value of KTP crystals. It is suggested that the success of this deposition relies on thetransient congruent process generated by a pulsed UV laser beam.

AB - Nonlinear optical films of potassium titanyl phosphate (KTiOP04, or KTP) have been, for the first time, fabricated by pulsed excimer laser deposition on several substrates such as sapphire, Si(100) crystals, and fused quartz slides. The properties of the deposited KTP films, such as the chemical stoichiometry, crystallinity, effective index of refraction, and Raman response, have been extensively characterized. All of the results match the values of KTP crystals. The nonlinear optical property of the second harmonic generation of the films has been evaluated, showing a highefficiency comparable to a bulk value of KTP crystals. It is suggested that the success of this deposition relies on thetransient congruent process generated by a pulsed UV laser beam.

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