Deposition of potassium niobate thin films by metalorganic chemical vapor deposition and their nonlinear optical properties

M. J. Nystrom; B. W. Wessels; J. Chen; D. Studebaker; T. J. Marks; W. P. Lin; G. K. Wong

doi:10.1557/proc-392-183

Deposition of potassium niobate thin films by metalorganic chemical vapor deposition and their nonlinear optical properties

M. J. Nystrom^*, B. W. Wessels, J. Chen, D. Studebaker, T. J. Marks, W. P. Lin, G. K. Wong

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

Ferroelectric potassium niobate thin films have been deposited by conventional, low pressure metalorganic chemical vapor deposition on several types of oxide substrates. The films were epitaxial with a c-axis orientation normal to the substrate. Atomic force microscopy revealed a surface roughness of 1 - 4 nm. Transmission electron microscopy showed the film/substrate interface to be semi-coherent with lattice misfit accommodated by misfit dislocations. The nonlinear optical properties of the KNbO₃ films were measured by a transmission technique. The room temperature, effective second order nonlinear coefficient was 13 pm/V.

Original language	English (US)
Pages (from-to)	183-188
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	392
DOIs	https://doi.org/10.1557/proc-392-183
State	Published - 1995
Event	Proceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA Duration: Apr 17 1995 → Apr 21 1995

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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@article{ade49bbe6b0e44589e5d008308b58f77,

title = "Deposition of potassium niobate thin films by metalorganic chemical vapor deposition and their nonlinear optical properties",

abstract = "Ferroelectric potassium niobate thin films have been deposited by conventional, low pressure metalorganic chemical vapor deposition on several types of oxide substrates. The films were epitaxial with a c-axis orientation normal to the substrate. Atomic force microscopy revealed a surface roughness of 1 - 4 nm. Transmission electron microscopy showed the film/substrate interface to be semi-coherent with lattice misfit accommodated by misfit dislocations. The nonlinear optical properties of the KNbO3 films were measured by a transmission technique. The room temperature, effective second order nonlinear coefficient was 13 pm/V.",

author = "Nystrom, {M. J.} and Wessels, {B. W.} and J. Chen and D. Studebaker and Marks, {T. J.} and Lin, {W. P.} and Wong, {G. K.}",

year = "1995",

doi = "10.1557/proc-392-183",

language = "English (US)",

volume = "392",

pages = "183--188",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1995 MRS Spring Meeting ; Conference date: 17-04-1995 Through 21-04-1995",

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TY - JOUR

T1 - Deposition of potassium niobate thin films by metalorganic chemical vapor deposition and their nonlinear optical properties

AU - Nystrom, M. J.

AU - Wessels, B. W.

AU - Chen, J.

AU - Studebaker, D.

AU - Marks, T. J.

AU - Lin, W. P.

AU - Wong, G. K.

PY - 1995

Y1 - 1995

N2 - Ferroelectric potassium niobate thin films have been deposited by conventional, low pressure metalorganic chemical vapor deposition on several types of oxide substrates. The films were epitaxial with a c-axis orientation normal to the substrate. Atomic force microscopy revealed a surface roughness of 1 - 4 nm. Transmission electron microscopy showed the film/substrate interface to be semi-coherent with lattice misfit accommodated by misfit dislocations. The nonlinear optical properties of the KNbO3 films were measured by a transmission technique. The room temperature, effective second order nonlinear coefficient was 13 pm/V.

AB - Ferroelectric potassium niobate thin films have been deposited by conventional, low pressure metalorganic chemical vapor deposition on several types of oxide substrates. The films were epitaxial with a c-axis orientation normal to the substrate. Atomic force microscopy revealed a surface roughness of 1 - 4 nm. Transmission electron microscopy showed the film/substrate interface to be semi-coherent with lattice misfit accommodated by misfit dislocations. The nonlinear optical properties of the KNbO3 films were measured by a transmission technique. The room temperature, effective second order nonlinear coefficient was 13 pm/V.

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U2 - 10.1557/proc-392-183

DO - 10.1557/proc-392-183

M3 - Conference article

AN - SCOPUS:0029539086

SN - 0272-9172

VL - 392

SP - 183

EP - 188

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1995 MRS Spring Meeting

Y2 - 17 April 1995 through 21 April 1995

ER -

Deposition of potassium niobate thin films by metalorganic chemical vapor deposition and their nonlinear optical properties

Abstract

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