Design and analysis of micro/meso-scale machine tools

K. F. Ehmann, R. E. Devor, S. G. Kapoor, J. Cao

Research output: Chapter in Book/Report/Conference proceedingChapter

9 Scopus citations


In this chapter, we discuss the important new class of machine tools, the micro/meso-scale machine tool or mMT, which is now addressing the exploding marketplace for miniature components with high relative accuracy requirements, true 3D features, and made in a wide range of engineering materials. These mMTs fill the gap created by the inability of the common MEMS processes to meet the aforementioned needs. In particular, we review a number of research efforts of the late 1990s and early 2000s that have been directed toward the development of the mMT and microfactory paradigms. We then provide in-depth discussions of efforts by Northwestern University (3-axis mMT) and the University of Illinois at Urbana-Champaign (5-axis mMT), introducing both the design principles used and technologies adopted in creating prototype mMTs. A machine tool calibration methodology specifically developed for mMTs is then presented. Finally, we will discuss recent efforts in Japan, Europe and the US to commercialise the mMT paradigm.

Original languageEnglish (US)
Title of host publicationSmart Devices and Machines for Advanced Manufacturing
PublisherSpringer London
Number of pages36
ISBN (Print)9781848001466
StatePublished - 2008

ASJC Scopus subject areas

  • General Engineering


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