Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity

Nannan Chen; Craig Tucker; Jonathan M. Engel; Yingchen Yang; Saunvit Pandya; Chang Liu

doi:10.1109/JMEMS.2007.902436

Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity

Nannan Chen^*, Craig Tucker, Jonathan M. Engel, Yingchen Yang, Saunvit Pandya, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

212 Scopus citations

Abstract

We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-μm tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16° is also achieved for the sensor's yaw response in air.

Original language	English (US)
Pages (from-to)	999-1014
Number of pages	16
Journal	Journal of Microelectromechanical Systems
Volume	16
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2007.902436
State	Published - Oct 2007

Keywords

Biomechanics
Microelectromechanical devices
Piezoresistive devices
Sensitivity
Sensory aids
Silicon

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2007.902436

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title = "Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity",

abstract = "We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-μm tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16° is also achieved for the sensor's yaw response in air.",

keywords = "Biomechanics, Microelectromechanical devices, Piezoresistive devices, Sensitivity, Sensory aids, Silicon",

author = "Nannan Chen and Craig Tucker and Engel, {Jonathan M.} and Yingchen Yang and Saunvit Pandya and Chang Liu",

year = "2007",

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doi = "10.1109/JMEMS.2007.902436",

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AU - Tucker, Craig

AU - Engel, Jonathan M.

AU - Yang, Yingchen

AU - Pandya, Saunvit

AU - Liu, Chang

PY - 2007/10

Y1 - 2007/10

N2 - We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-μm tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16° is also achieved for the sensor's yaw response in air.

AB - We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-μm tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16° is also achieved for the sensor's yaw response in air.

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Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity

Abstract

Keywords

ASJC Scopus subject areas

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