We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-μm tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16° is also achieved for the sensor's yaw response in air.
- Microelectromechanical devices
- Piezoresistive devices
- Sensory aids
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering