Design and fabrication of a novel microfluidic nanoprobe

Keyphrases

• Microfluidics 100%
• Nanoprobe 100%
• Nanofabrication 25%
• On chip 25%
• Silicon Nitride 25%
• Micromachining Technique 25%
• Dip-pen Nanolithography 25%
• Surface Micromachining 25%
• Volcano 25%
• Interactive Analysis 25%
• Bulk Micromachining 25%
• Sacrificial Layer 25%
• Directions for Improvement 25%
• Bird Beak 25%
• Sealing Layer 25%
• Layer Birds 25%
• Electrochemical Nanoprobes 25%
• Under-etching 25%

Engineering

• Microchannel 100%
• Applicability 50%
• Nitride 50%
• Micro Machining 50%
• Surface Micro-Machining 50%
• Dip-Pen Nanolithography 50%
• Nanofabrication Process 50%
• Illustrates 50%