Design and fabrication of artificial lateral line flow sensors

Zhifang Fan, Jack Chen, Jun Zou, David Bullen, Chang Liu*, Fred Delcomyn

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

262 Scopus citations

Abstract

Underwater flow sensing is important for many robotics and military applications, including underwater robots and vessels. We report the development of micromachined, distributed flow sensors based on a biological inspiration, the fish lateral line sensors. Design and fabrication processes for realizing individual lateral line sensor nodes are discussed in this paper, along with preliminary characterization results.

Original languageEnglish (US)
Pages (from-to)655-661
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number5
DOIs
StatePublished - Sep 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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