Abstract
Underwater flow sensing is important for many robotics and military applications, including underwater robots and vessels. We report the development of micromachined, distributed flow sensors based on a biological inspiration, the fish lateral line sensors. Design and fabrication processes for realizing individual lateral line sensor nodes are discussed in this paper, along with preliminary characterization results.
Original language | English (US) |
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Pages (from-to) | 655-661 |
Number of pages | 7 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 12 |
Issue number | 5 |
DOIs | |
State | Published - Sep 2002 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering