Design and fabrication of multilayer Si/SiO2 super-high N.A.GRIN lens for nanowaveguide to optical fiber coupling

Ter Hoe Loh*, Qian Wang, Keh Ting Ng, Yingyan Huang, Seng Tiong Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Compact multilayer Si/SiO2 asymmetric GRIN lens (length:10~20μm) for vertical optical mode-size transformation from sub-0.5μm of nanowaveguide to ~10μm of single-mode-fiber, is proposed and designed. We report success in deposition and etching of 6~8μm multilayer Si/SiO2.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2009
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528780
DOIs
StatePublished - 2009
EventFrontiers in Optics, FiO 2009 - San Jose, CA, United States
Duration: Oct 11 2009Oct 15 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherFrontiers in Optics, FiO 2009
CountryUnited States
CitySan Jose, CA
Period10/11/0910/15/09

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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