@inproceedings{0bab1ef8379947ec912bee9fa50d4fd1,
title = "Design and fabrication of multilayer Si/SiO2 super-high N.A.GRIN lens for nanowaveguide to optical fiber coupling",
abstract = "Compact multilayer Si/SiO2 asymmetric GRIN lens (length:10~20μm) for vertical optical mode-size transformation from sub-0.5μm of nanowaveguide to ~10μm of single-mode-fiber, is proposed and designed. We report success in deposition and etching of 6~8μm multilayer Si/SiO2.",
author = "Loh, {Ter Hoe} and Qian Wang and Ng, {Keh Ting} and Yingyan Huang and Ho, {Seng Tiong}",
year = "2009",
doi = "10.1364/fio.2009.jwc53",
language = "English (US)",
isbn = "9781557528780",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "Frontiers in Optics, FiO 2009",
note = "Frontiers in Optics, FiO 2009 ; Conference date: 11-10-2009 Through 15-10-2009",
}