Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor

INIS

• capacitors 100%
• plates 88%
• inductors 88%
• tuning 55%
• range 44%
• quality factor 44%
• design 22%
• modeling 22%
• losses 22%
• plasticity 22%
• substrates 22%
• silicon 22%
• comparative evaluations 11%
• performance 11%
• dimensions 11%
• microstructure 11%
• mhz range 11%
• ghz range 11%
• electrostatics 11%
• frequency range 11%
• capacitance 11%
• microelectromechanical systems 11%

Engineering

• Inductor 88%
• High Quality Factor 44%
• Assembly 33%
• Parallel Plate 22%
• Design 22%
• Microstructure 11%
• Silicon Substrate 11%
• Capacitance 11%
• Prototype 11%
• Passive Element 11%
• Scattering Parameters 11%
• Electrostatic Actuation 11%
• Return Loss 11%
• Bottom Plate 11%
• Performance 11%
• Losses 11%
• Substrates 11%
• Communication System 11%
• Frequency Range 11%

Physics

• Plastic Deformation 22%
• Q Factor 22%
• Parallel Plate 22%
• Microelectromechanical System 22%
• Microstructure 11%
• Silicon 11%
• Microelectromechanical System 11%
• Capacitance 11%
• Area 11%
• Performance 11%
• Shapes 11%
• Technology 11%
• Substrates 11%
• Dimensions 11%
• Frequency Ranges 11%
• Coil 11%