Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor

Jinghong Chen*, Jun Zou, Chang Liu, José E. Schutt-Ainé, Sung Mo Steve Kang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

62 Scopus citations

Fingerprint

Dive into the research topics of 'Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science