@inproceedings{12355aa7a19642059bbf88920f407e04,
title = "Design and prototyping of a surface micromachined parylene microvalve with hybrid actuation scheme: On-chip thermopneumatic initiation and electrostatic latching",
abstract = "We report a development of microvalve that combines the advantages of highforce thermopneumatic actuation and low-power nature of electrostatic actuation. Microvalve is the most important component in realizing programmable and multifunctional microfluidic systems. Many researchers seek to develop microvalves with small leakage, portability, and small footage. Dominantly, external pneumatic source is used as actuation source. This makes it difficult to be portable. Also, elastomer as dominant valve material has compatibility issues against other surface micromachined MEMS components. It is our motivation to develop a microvalve without such external dependence and limitations.",
keywords = "Electrostatic, Parylene, Thermopneumatic, Valve",
author = "Ryu, {K. S.} and X. Wang and K. Shaikh and E. Goluch and P. Mathias and C. Liu",
year = "2005",
month = jan,
day = "1",
language = "English (US)",
isbn = "0974361119",
series = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Transducer Research Foundation",
pages = "1192--1194",
booktitle = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference",
note = "9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 ; Conference date: 09-10-2005 Through 13-10-2005",
}