Design and prototyping of a surface micromachined parylene microvalve with hybrid actuation scheme: On-chip thermopneumatic initiation and electrostatic latching

K. S. Ryu, X. Wang, K. Shaikh, E. Goluch, P. Mathias, C. Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

We report a development of microvalve that combines the advantages of highforce thermopneumatic actuation and low-power nature of electrostatic actuation. Microvalve is the most important component in realizing programmable and multifunctional microfluidic systems. Many researchers seek to develop microvalves with small leakage, portability, and small footage. Dominantly, external pneumatic source is used as actuation source. This makes it difficult to be portable. Also, elastomer as dominant valve material has compatibility issues against other surface micromachined MEMS components. It is our motivation to develop a microvalve without such external dependence and limitations.

Original languageEnglish (US)
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
Subtitle of host publication9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherTransducer Research Foundation
Pages1192-1194
Number of pages3
ISBN (Print)0974361119, 9780974361116
StatePublished - Jan 1 2005
Event9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States
Duration: Oct 9 2005Oct 13 2005

Publication series

NameMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Volume1

Other

Other9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
CountryUnited States
CityBoston, MA
Period10/9/0510/13/05

Keywords

  • Electrostatic
  • Parylene
  • Thermopneumatic
  • Valve

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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