Design of a high bandwidth nonresonant tertiary motion generator for elliptical vibration texturing

Keyu Chen, Chang Si, Ping Guo*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


This paper presents the design and characteristics of a new two-dimensional nonresonant tertiary motion generator which is based on the flextensional structure. A tool holder connects two perpendicularly placed flextensional actuators with flexure hinges which decouple the motion outputs from the two actuators. Piezoelectric stacks, which are preloaded through precision screws, are used to provide input displacements. By balancing the requirements of driving current, stiffness, and the displacement amplification ratio, the proposed design is targeted to operate at above 10 kHz with two-dimensional vibrations amplitude of 10 lm in each direction. Technical difficulties in driving a nonresonant mode piezoelectric actuator at a high frequency are discussed. The solutions and optimization procedures are presented in this paper. The design is optimized by finite-element simulation; and the results are presented and verified by our prototype design.

Original languageEnglish (US)
Article number011008
JournalJournal of Micro and Nano-Manufacturing
Issue number1
StatePublished - Mar 1 2017


  • Elliptical vibration texturing
  • Flextensional transducer
  • Nonresonant vibrator
  • Tertiary motion generator

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Industrial and Manufacturing Engineering
  • Mechanics of Materials


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