TY - GEN
T1 - Design of radio frequency (RF) MEMS switches - Modeling
AU - Zhu, Yong
AU - Espinosa, Horacio D.
PY - 2003
Y1 - 2003
N2 - Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for large structural deflection are developed in a generalized form. In some practical applications, finite element models are required to account for the effects of all the design parameters: switch geometry, non-uniform state of residual stress, temperature and etc. A 3-D finite element model between structural, electrical and thermal domains is developed. This 3-D model is applicable to the design of all types of electrostatic actuators, though that of a capacitive coupling switch was examined.
AB - Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for large structural deflection are developed in a generalized form. In some practical applications, finite element models are required to account for the effects of all the design parameters: switch geometry, non-uniform state of residual stress, temperature and etc. A 3-D finite element model between structural, electrical and thermal domains is developed. This 3-D model is applicable to the design of all types of electrostatic actuators, though that of a capacitive coupling switch was examined.
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U2 - 10.1115/imece2003-41945
DO - 10.1115/imece2003-41945
M3 - Conference contribution
AN - SCOPUS:1942424120
SN - 0791837211
SN - 9780791837214
T3 - American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
SP - 265
EP - 270
BT - Micro-Electro-Mechanical Systems (MEMS) - 2003
PB - American Society of Mechanical Engineers
T2 - 2003 ASME International Mechanical Engineering Congress
Y2 - 15 November 2003 through 21 November 2003
ER -