Design of radio frequency (RF) MEMS switches - Modeling

Yong Zhu*, Horacio D. Espinosa

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for large structural deflection are developed in a generalized form. In some practical applications, finite element models are required to account for the effects of all the design parameters: switch geometry, non-uniform state of residual stress, temperature and etc. A 3-D finite element model between structural, electrical and thermal domains is developed. This 3-D model is applicable to the design of all types of electrostatic actuators, though that of a capacitive coupling switch was examined.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2003
PublisherAmerican Society of Mechanical Engineers
Pages265-270
Number of pages6
ISBN (Print)0791837211, 9780791837214
DOIs
StatePublished - 2003
Event2003 ASME International Mechanical Engineering Congress - Washington, DC, United States
Duration: Nov 15 2003Nov 21 2003

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
Volume5

Other

Other2003 ASME International Mechanical Engineering Congress
CountryUnited States
CityWashington, DC
Period11/15/0311/21/03

ASJC Scopus subject areas

  • Engineering(all)

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