Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry

P. L. Washington*, H. C. Ong, J. Y. Dai, R. P.H. Chang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

176 Scopus citations


Spectroscopic ellipsometry (SE) has been used to determine the complex pseudo dielectric functions, ε1(E)+iε2(E), of ZnO films on (0001) Al2O3 substrates over the spectral range of 1.33 and 4.96 eV at room temperature. The SE measurements are carried out with E⊥c at angles of incidence of 60° and 65° with respect to the surface normal. Below the band gap, the refractive index n is found to follow the first order Sellmeir dispersion relationship n2(λ)=1+1.881λ2/(λ 2-0.05382). A free excitonic structure located at the band edge of 3.32 eV is clearly observed in the pseudo absorption spectrum. Elliott expression with Lorentzian broadening is used to model the pseudo absorption coefficient above the band edge.

Original languageEnglish (US)
Pages (from-to)3261-3263
Number of pages3
JournalApplied Physics Letters
Issue number25
StatePublished - 1998

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


Dive into the research topics of 'Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry'. Together they form a unique fingerprint.

Cite this