Development and characterization of micromachined hollow cathode plasma display devices

Jack Chen; Sung Jin Park; Zhifang Fan; J. Gary Eden; Chang Liu

doi:10.1109/JMEMS.2002.802907

Development and characterization of micromachined hollow cathode plasma display devices

Jack Chen^*, Sung Jin Park, Zhifang Fan, J. Gary Eden, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

In this paper, we report the development of hollow-cathode micro plasma devices made using micromachining techniques. Compared with larger discharge devices, micromachined discharge devices operate at much higher pressures, up to 1 atm. Linear current-voltage relationships are obtained, potentially simplifying the control electronics for such devices. The size of micro-machined discharge units is reduced and the distribution of sizes and light intensity in an array is more uniform relative to previous devices.

Original language	English (US)
Pages (from-to)	536-543
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	11
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2002.802907
State	Published - Oct 2002

Keywords

Hollow cathode
Microdischarge
Micromachine

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2002.802907

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AU - Fan, Zhifang

AU - Eden, J. Gary

AU - Liu, Chang

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AB - In this paper, we report the development of hollow-cathode micro plasma devices made using micromachining techniques. Compared with larger discharge devices, micromachined discharge devices operate at much higher pressures, up to 1 atm. Linear current-voltage relationships are obtained, potentially simplifying the control electronics for such devices. The size of micro-machined discharge units is reduced and the distribution of sizes and light intensity in an array is more uniform relative to previous devices.

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KW - Microdischarge

KW - Micromachine

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Development and characterization of micromachined hollow cathode plasma display devices

Abstract

Keywords

ASJC Scopus subject areas

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