Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Tassie K. Andersen, Seyoung Cook, Erika Benda, Hawoong Hong, Laurence D. Marks, Dillon D. Fong

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. The high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO3 oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.

Original languageEnglish (US)
Article number033905
JournalReview of Scientific Instruments
Volume89
Issue number3
DOIs
StatePublished - Mar 1 2018

ASJC Scopus subject areas

  • Instrumentation

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