@inproceedings{fb7f1b9f50b94d3f98011cdeac76c255,
title = "Development of a MEMS vertical planar coil inductor",
abstract = "This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel 3-Dimensional bath-scale self-assembly process (Plastic Deformation Magnetic Assembly (PDMA)). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared, demonstrating superior performance due to reduced substrate effects and also increased substrate space savings for the vertical planar coil inductors.",
keywords = "MEMS, PDMA, Planar coil inductor, Quality factor, Resonance frequency",
author = "Jinghong Chen and Jun Zou and Chang Liu and Kang, {Sung Mo}",
year = "2002",
language = "English (US)",
isbn = "0970827571",
series = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",
pages = "344--347",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",
note = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 ; Conference date: 21-04-2002 Through 25-04-2002",
}