@inproceedings{47eaf8a7f4f84699ab98e5a2eee5383c,
title = "Development of a multi-modal, flexible tactile sensing skin using polymer micromachining",
abstract = "Inspired by the superior functionality of biological skin, we report a first multi-modal, flexible, and robust tactile sensing skin based on polymer substrates. The demonstrated device successfully incorporates multiple sensor modalities into a compact {"}node{"} for evaluating contact forces and film curvature, as well as the relative hardness, thermal conductivity, and temperature of the contacted object. Sensing is accomplished via thin film metal gold heaters, nickel RTDs (Resistance Temperature Device), and NiCr (nichrome) strain gauges. Built on a micromachined polyimide (DuPont Kapton HN200) film, the sensors provide qualitative measurements of contact object properties. Experimental characterization of the sensors' performance presented.",
keywords = "Biosensors, Micromachining, Polymers, Robustness, Sensor phenomena and characterization, Skin, Substrates, Temperature sensors, Thermal conductivity, Thermal sensors",
author = "J. Engel and J. Chen and Chang Liu",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1216943",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1027--1030",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}