Abstract
A new parallel-plate tunable capacitor designh with a tuning range greater than 50% limit imposed by the pull-in effect is described. This new design has been validated previously by finite element analysis and simulation using MEMCAD 4.0.
Original language | English (US) |
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Pages (from-to) | 111-112 |
Number of pages | 2 |
Journal | Annual Device Research Conference Digest |
State | Published - Jan 1 2000 |
ASJC Scopus subject areas
- Engineering(all)