Development of a novel micro electromechanical tunable capacitor with a high tuning range

Jun Zou*, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

A new parallel-plate tunable capacitor designh with a tuning range greater than 50% limit imposed by the pull-in effect is described. This new design has been validated previously by finite element analysis and simulation using MEMCAD 4.0.

Original languageEnglish (US)
Pages (from-to)111-112
Number of pages2
JournalAnnual Device Research Conference Digest
StatePublished - Jan 1 2000

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Development of a novel micro electromechanical tunable capacitor with a high tuning range'. Together they form a unique fingerprint.

  • Cite this