Abstract
A new, micromachined magnetostatic membrane actuator was developed. The resultant actuator is capable of generating significantly larger membrane displacements than that of typical membrane microactuators.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 109-110 |
| Number of pages | 2 |
| Journal | Annual Device Research Conference Digest |
| State | Published - Jan 1 2000 |
ASJC Scopus subject areas
- General Engineering