Development of a novel micromachined magnetostatic membrane actuator

Melvin Khoo*, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

A new, micromachined magnetostatic membrane actuator was developed. The resultant actuator is capable of generating significantly larger membrane displacements than that of typical membrane microactuators.

Original languageEnglish (US)
Pages (from-to)109-110
Number of pages2
JournalAnnual Device Research Conference Digest
StatePublished - Jan 1 2000

ASJC Scopus subject areas

  • Engineering(all)

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