TY - JOUR
T1 - Development of a piezoelectrically actuated dual-stage fast tool servo
AU - Zhao, Dongpo
AU - Zhu, Zihui
AU - Huang, Peng
AU - Guo, Ping
AU - Zhu, Li Min
AU - Zhu, Zhiwei
N1 - Funding Information:
This work is jointly supported by the National Natural Science Foundation of China ( 51705254 ), and the Natural Science Foundation of Jiangsu Province ( BK20170836 ).
Publisher Copyright:
© 2020 Elsevier Ltd
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/10
Y1 - 2020/10
N2 - By serially combining two piezoelectrically actuated compliant stages, a dual-stage fast tool servo (FTS) is developed to greatly enhance the trajectory tracking performance of conventional FTS, which is crucial for turning micro/nanostructured functional surfaces. By means of the matrix based compliance modeling method, mechanical performance of the dual-stage FTS is analytically modeled, and the structural dimensions are accordingly optimized with further verification through finite element analysis. With respect to the trajectory tracking, the master–slave control strategy is employed using a simple proportional-integration controller for the primary stage, and the primary control error is then tracked by the secondary stage through the system model based inversion-free open-loop control. For the system model, the Prandtl-Ishlinskii model cascading with the system dynamics model is established to describe the dynamic hysteresis. The basic working performance including both static and dynamic aspect is experimentally examined, and further tracking control of both simple harmonics and complicated commands having high working frequency is conducted, demonstrating the significantly improved performance of the dual-stage FTS for high frequency tracking.
AB - By serially combining two piezoelectrically actuated compliant stages, a dual-stage fast tool servo (FTS) is developed to greatly enhance the trajectory tracking performance of conventional FTS, which is crucial for turning micro/nanostructured functional surfaces. By means of the matrix based compliance modeling method, mechanical performance of the dual-stage FTS is analytically modeled, and the structural dimensions are accordingly optimized with further verification through finite element analysis. With respect to the trajectory tracking, the master–slave control strategy is employed using a simple proportional-integration controller for the primary stage, and the primary control error is then tracked by the secondary stage through the system model based inversion-free open-loop control. For the system model, the Prandtl-Ishlinskii model cascading with the system dynamics model is established to describe the dynamic hysteresis. The basic working performance including both static and dynamic aspect is experimentally examined, and further tracking control of both simple harmonics and complicated commands having high working frequency is conducted, demonstrating the significantly improved performance of the dual-stage FTS for high frequency tracking.
KW - Dual-stage mechanism
KW - Fast tool servo
KW - Hysteresis effect
KW - Master-slave control
KW - Piezoelectric actuator
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U2 - 10.1016/j.ymssp.2020.106873
DO - 10.1016/j.ymssp.2020.106873
M3 - Article
AN - SCOPUS:85083298887
VL - 144
JO - Mechanical Systems and Signal Processing
JF - Mechanical Systems and Signal Processing
SN - 0888-3270
M1 - 106873
ER -