Development of polyimide-based flexible tactile sensing skin

Jonathan Engel; Jack Chen; Chang Liu; Bruce R. Flachsbart; John C. Selby; Mark A. Shannon

doi:10.1557/proc-736-d4.5

Development of polyimide-based flexible tactile sensing skin

Jonathan Engel^*, Jack Chen, Chang Liu, Bruce R. Flachsbart, John C. Selby, Mark A. Shannon

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

17 Scopus citations

Abstract

We present a novel microfabrication process for realizing a new type of flexible sensory "smart skin". In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process yields flexible sensory skins in a low cost, efficient manner. Experimental characterization of the devices is also presented. The demonstrated sensors use metal-film strain gauges in a multiplexed two-dimensional array of tactile pixels (taxels) embedded in a polyimide thin film membrane to detect force distribution on the flexible skin. The arrays have been used to image force distributions and could be used with slip-detection friction measurement for robotic gripping application.

Original language	English (US)
Pages (from-to)	165-170
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	736
DOIs	https://doi.org/10.1557/proc-736-d4.5
State	Published - 2002
Event	Electronics on Unconventional Substrates-Electrotextiles and Giant-Area Flexible Circuits - Boston, MA, United States Duration: Dec 2 2002 → Dec 3 2002

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Cite this

@article{4fee91fc261a41d6bfa9fbade227ded8,

title = "Development of polyimide-based flexible tactile sensing skin",

abstract = "We present a novel microfabrication process for realizing a new type of flexible sensory {"}smart skin{"}. In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process yields flexible sensory skins in a low cost, efficient manner. Experimental characterization of the devices is also presented. The demonstrated sensors use metal-film strain gauges in a multiplexed two-dimensional array of tactile pixels (taxels) embedded in a polyimide thin film membrane to detect force distribution on the flexible skin. The arrays have been used to image force distributions and could be used with slip-detection friction measurement for robotic gripping application.",

author = "Jonathan Engel and Jack Chen and Chang Liu and Flachsbart, {Bruce R.} and Selby, {John C.} and Shannon, {Mark A.}",

year = "2002",

doi = "10.1557/proc-736-d4.5",

language = "English (US)",

volume = "736",

pages = "165--170",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Electronics on Unconventional Substrates-Electrotextiles and Giant-Area Flexible Circuits ; Conference date: 02-12-2002 Through 03-12-2002",

}

TY - JOUR

T1 - Development of polyimide-based flexible tactile sensing skin

AU - Engel, Jonathan

AU - Chen, Jack

AU - Liu, Chang

AU - Flachsbart, Bruce R.

AU - Selby, John C.

AU - Shannon, Mark A.

PY - 2002

Y1 - 2002

N2 - We present a novel microfabrication process for realizing a new type of flexible sensory "smart skin". In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process yields flexible sensory skins in a low cost, efficient manner. Experimental characterization of the devices is also presented. The demonstrated sensors use metal-film strain gauges in a multiplexed two-dimensional array of tactile pixels (taxels) embedded in a polyimide thin film membrane to detect force distribution on the flexible skin. The arrays have been used to image force distributions and could be used with slip-detection friction measurement for robotic gripping application.

AB - We present a novel microfabrication process for realizing a new type of flexible sensory "smart skin". In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process yields flexible sensory skins in a low cost, efficient manner. Experimental characterization of the devices is also presented. The demonstrated sensors use metal-film strain gauges in a multiplexed two-dimensional array of tactile pixels (taxels) embedded in a polyimide thin film membrane to detect force distribution on the flexible skin. The arrays have been used to image force distributions and could be used with slip-detection friction measurement for robotic gripping application.

UR - http://www.scopus.com/inward/record.url?scp=0038204698&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038204698&partnerID=8YFLogxK

U2 - 10.1557/proc-736-d4.5

DO - 10.1557/proc-736-d4.5

M3 - Conference article

AN - SCOPUS:0038204698

SN - 0272-9172

VL - 736

SP - 165

EP - 170

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Electronics on Unconventional Substrates-Electrotextiles and Giant-Area Flexible Circuits

Y2 - 2 December 2002 through 3 December 2002

ER -

Development of polyimide-based flexible tactile sensing skin

Abstract

ASJC Scopus subject areas

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