Development of polymer-based artificial haircell using surface micromachining and 3D assembly

J. Chen*, J. Engel, Chang Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

32 Scopus citations

Abstract

We report the development of an artificial haircell (AHC) fabricated using polymer surface micromachining and efficient 3D assembly. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design and fabrication process are discussed in the paper. Response to static deflection and airflow is also discussed.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1035-1038
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Keywords

  • Assembly
  • Capacitive sensors
  • Fluid flow measurement
  • Hair
  • Micromachining
  • Polymer films
  • Robustness
  • Silicon
  • Substrates
  • Switches

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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