Development of surface micromachined magnetic actuators using electroplated permalloy

Results on design, fabrication and testing of silicon micromachined magnetic actuators are presented. Magnetic actuators are capable of providing large force (in the order of mN) and large displacement (micrometer to millimeter range) within micro electromechanical devices and systems. Electroplated permalloy (Ni₈₀Fe₂₀) material is the media for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film. Applications of such magnetic actuators in massive parallel assembly and high-yield surface-structure release are discussed.