Development of vertical planar coil inductors using plastic deformation magnetic assembly (PDMA)

Jun Zou*, Josh G. Nickel, Drew Trainor, Chang Liu, Jose E. Schutt-Aine

*Corresponding author for this work

Research output: Contribution to journalConference article

15 Scopus citations

Abstract

This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel 3-Dimensional bath-scale self-assembly process (Plastic Deformation Magnetic Assembly (PDMA)). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared, demonstrating superior performance due to reduced substrate effects and also increased substrate space savings for the vertical planar coil inductors.

Original languageEnglish (US)
Pages (from-to)193-196
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume3
StatePublished - Dec 1 2001
EventInternational Microwave Symposium Digest IEEE-MTT-S 2001 - Phoenix, AZ, United States
Duration: May 20 2001May 25 2001

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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