Dictionary based image enhancement for integrated circuit imaging

T. B. Cilingiroglu, A. Tuysuzoglu, W. C. Karl, J. Konrad, M. S. Unlu, B. B. Goldberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

The rapid decrease in the dimensions of integrated circuits has necessitated corresponding higher-resolution methods for defect imaging. Current state of the art, defect imaging systems are reaching the limits of their resolution. In this work, we are proposing a new overcomplete dictionary based sparse signal imaging framework to improve the resolution and localization in confocal microscopy systems for backside optical integrated circuit defect imaging. The domain of integrated circuit imaging is particularly suitable for the application of overcomplete dictionaries in an image reconstruction framework because the images are highly structured, containing predictable building blocks derivable from the corresponding computer aided design layouts. This structure provides a strong and natural a-priori dictionary for scene reconstruction. This dictionary prior is coupled with a physically-based observation model to create enhanced scene reconstructions. The approach is described and results on simulated data are provided.

Original languageEnglish (US)
Title of host publication2013 IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2013 - Proceedings
Pages1869-1873
Number of pages5
DOIs
StatePublished - Oct 18 2013
Event2013 38th IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2013 - Vancouver, BC, Canada
Duration: May 26 2013May 31 2013

Publication series

NameICASSP, IEEE International Conference on Acoustics, Speech and Signal Processing - Proceedings
ISSN (Print)1520-6149

Other

Other2013 38th IEEE International Conference on Acoustics, Speech, and Signal Processing, ICASSP 2013
Country/TerritoryCanada
CityVancouver, BC
Period5/26/135/31/13

Keywords

  • backside integrated circuit imaging
  • high numerical aperture microscopy
  • image reconstruction
  • overcomplete dictionary
  • sparse signal representation

ASJC Scopus subject areas

  • Software
  • Signal Processing
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Dictionary based image enhancement for integrated circuit imaging'. Together they form a unique fingerprint.

Cite this