Dictionary-based sparse representation for resolution improvement in laser voltage imaging of CMOS integrated circuits

T. Berkin Cilingiroglu, Mahmoud Zangeneh, Aydan Uyar, W. Clem Karl, Janusz Konrad, Ajay Joshi, Bennett B. Goldberg, M. Selim Unlu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The rapid decrease in the dimensions of integrated circuits with a simultaneous increase in component density have introduced resolution challenges for optical failure analysis techniques. Although optical microscopy efforts continue to increase resolution of optical systems through hardware modifications, signal processing methods are essential to complement these efforts to meet the resolution requirements for the nanoscale integrated circuit technologies. In this work, we focus on laser voltage imaging as the optical failure analysis technique and show how an overcomplete dictionary-based sparse representation can improve resolution and localization accuracy. We describe a reconstruction approach based on this sparse representation and validate its performance on simulated data. We achieve an 80% reduction of the localization error.

Original languageEnglish (US)
Title of host publicationProceedings of the 2015 Design, Automation and Test in Europe Conference and Exhibition, DATE 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages597-600
Number of pages4
ISBN (Electronic)9783981537048
StatePublished - Apr 22 2015
Event2015 Design, Automation and Test in Europe Conference and Exhibition, DATE 2015 - Grenoble, France
Duration: Mar 9 2015Mar 13 2015

Publication series

NameProceedings -Design, Automation and Test in Europe, DATE
Volume2015-April
ISSN (Print)1530-1591

Other

Other2015 Design, Automation and Test in Europe Conference and Exhibition, DATE 2015
CountryFrance
CityGrenoble
Period3/9/153/13/15

ASJC Scopus subject areas

  • Engineering(all)

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