Dielectric properties of plasma-spray-deposited BaTiO3 and Ba0.68Sr0.32TiO3 thick films

K. Ahn*, B. W. Wessels, S. Sampath

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

The dielectric properties of high-k dielectric BaTiO3 and Ba0.68ST0.32TiO3 thick films deposited on alumina substrates using a plasma-spray process were investigated. The as-deposited films were predominantly crystalline but contained an amorphous second phase, the amount of which depended on spray conditions. The effect of the spray conditions on crystallinity was studied and related to the dielectric properties of the films. The presence of a low dielectric constant interfacial layer in plasma-spray-deposited films was determined from the dependence of the dielectric constant on film thickness. After annealing at 500 °C for 20 h in air, the crystallinity and dielectric constant increased. Annealing was also found to affect the interfacial layer properties.

Original languageEnglish (US)
Pages (from-to)1227-1231
Number of pages5
JournalJournal of Materials Research
Volume18
Issue number5
DOIs
StatePublished - May 2003

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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