Diffractive x-ray optics using production fabrication methods

A. Stein*, C. Jacobsen, K. Evans-Lutterodt, D. M. Tennant, G. Bogart, F. Klemens, L. E. Ocola, B. J. Choi, S. V. Sreenivasan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Attempts to marry 100 kV e-beam lithography with established fabrication methods proved successful. Hard x-ray focusing was achieved with Bragg-Fresnel optics. Based on the data, it was emphasized that completed fabrication and testing of the zone plates on SOI will reveal the ultimate usefulness of these reflective zone plates for applications.

Original languageEnglish (US)
Pages (from-to)214-219
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number1 SPEC.
DOIs
StatePublished - Jan 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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