Abstract
The thickness dependence of the dielectric properties of epitaxial BaTiO3 thin films was investigated for thicknesses ranging from 15 to 320 nm. The films were deposited by low-pressure metalorganic chemical vapor deposition on (100) MgO substrates. The relative dielectric permittivity and the loss tangent values decreased with decreasing thickness. High-temperature dielectric measurements showed that with decreasing film thickness, the ferroelectric-to-paraelectric transition temperature decreased, the relative dielectric permittivity decreased, and the phase transition was diffuse. The c/a ratio also decreased with decreasing film thickness. The observed behavior for epitaxial films of BaTiO3 was attributed to the presence of strain in the films.
Original language | English (US) |
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Pages (from-to) | 669-674 |
Number of pages | 6 |
Journal | Journal of Materials Research |
Volume | 17 |
Issue number | 3 |
DOIs | |
State | Published - Mar 2002 |
Funding
The authors would like to thank B.H. Hoerman and Dr. Alokmay Datta of Northwestern University and Dr. K. Ghosh of Argonne National Laboratory for fruitful discussions. S.C. acknowledges the cooperation of Dr. Clinton B. Lee. The authors acknowledge support of the U.S. Department of Energy under Grant No. DE FG02-85ER45209 and the NSF MRSEC program under Grant No. DMR-962472.
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering