Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks

Matthew C. George, Erik C. Nelson, John A. Rogers, Paul V. Braun

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

Nitty gritty: A chemically amplified poly-(methylsilsesquioxane) resist based on the acid-catalyzed condensation of silanol end groups was developed for direct fabrication of hybrid 3D microstructures (see picture) by conformal and maskless proximity-field nanopatterning. Fibers, colloidal particles, helical arrays, and photonic crystals were fabricated by varying phase-mask design and exposure conditions. (Figure Presented).

Original languageEnglish (US)
Pages (from-to)144-148
Number of pages5
JournalAngewandte Chemie - International Edition
Volume48
Issue number1
DOIs
StatePublished - Jan 21 2009

Keywords

  • Nanoimprinting
  • Nanolithography
  • Photochemistry
  • Silsesquioxanes

ASJC Scopus subject areas

  • Catalysis
  • Chemistry(all)

Fingerprint

Dive into the research topics of 'Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks'. Together they form a unique fingerprint.

Cite this