Direct imaging of the depletion region of an InP p-n junction under bias using scanning voltage microscopy

D. Ban, E. H. Sargent, St J. Dixon-Warren*, I. Calder, A. J. SpringThorpe, R. Dworschak, G. Este, J. K. White

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

Direct imaging of the depletion region of an InP p-n junction under bias using scanning voltage microscopy (SVM) was presented. The SVM results were compared with the scanning spreading resistance microscopy (SSRM) measurements under zero bias on the same sample. Results showed that the measured voltage was determined by the changes in the electrostatic potential and the carrier concentration at the SVM tip with and without the applied bias.

Original languageEnglish (US)
Pages (from-to)5057-5059
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number26
DOIs
StatePublished - Dec 23 2002

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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