Abstract
Direct imaging of the depletion region of an InP p-n junction under bias using scanning voltage microscopy (SVM) was presented. The SVM results were compared with the scanning spreading resistance microscopy (SSRM) measurements under zero bias on the same sample. Results showed that the measured voltage was determined by the changes in the electrostatic potential and the carrier concentration at the SVM tip with and without the applied bias.
Original language | English (US) |
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Pages (from-to) | 5057-5059 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 81 |
Issue number | 26 |
DOIs | |
State | Published - Dec 23 2002 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)