@inproceedings{6416a171085d442195c4ded1b2ab0472,
title = "Direct laser writing of polymer micro-ring resonator ultrasonic sensors",
abstract = "With the development of photoacoustic technology in recent years, ultrasound-related sensors play a vital role in a number of areas ranging from scientific research to nondestructive testing. Compared with the traditional PZT transducer as ultrasonic sensors, novel ultrasonic sensors based on optical methods such as micro-ring resonators have gained increasing attention. The total internal reflection of the light along the cavity results in light propagating in microcavities as whispering gallery modes (WGMs), which are extremely sensitive to change in the radius and refractive index of the cavity induced by ultrasound strain field. In this work, we present a polymer optical micro-ring resonator based ultrasonic sensor fabricated by direct laser writing optical lithography. The design consists of a single micro-ring and a straight tapered waveguide that can be directly coupled by single mode fibers (SMFs). The design and fabrication of the printed polymer resonator have been optimized to provide broad bandwidth and high optical quality factor to ensure high detection sensitivity. The experiments demonstrate the potential of the polymer micro-ring resonator to works as a high-performance ultrasonic sensor.",
keywords = "Polymer micro-ring resonator, direct laser writing, fiber ring laser, integrated sensor, ultrasonic sensor",
author = "Heming Wei and Sridhar Krishnaswamy",
note = "Publisher Copyright: {\textcopyright} 2017 SPIE.; Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2017 ; Conference date: 26-03-2017 Through 29-03-2017",
year = "2017",
doi = "10.1117/12.2256364",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Lynch, {Jerome P.}",
booktitle = "Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2017",
}