Direct write nano etching method

@misc{08335c5d80dc4748bf1c5b1ef613d536,

title = "Direct write nano etching method",

author = "Chad Mirkin",

note = "filingdate: 2000-1-7 issueddate: 2011-4-8 Status: published attorneydocketnumber: 1998-087-15; HK 1110298",

year = "2011",

month = jul,

day = "8",

language = "English",

type = "Patent",

}

Mirkin, C Jul. 08 2011, Direct write nano etching method, Patent No. HK 1110298.

Patent No.: HK 1110298. Jul 08, 2011.

Research output: Patent

TY - PAT

T1 - Direct write nano etching method

AU - Mirkin, Chad

N1 - filingdate: 2000-1-7 issueddate: 2011-4-8 Status: published attorneydocketnumber: 1998-087-15

PY - 2011/7/8

Y1 - 2011/7/8

M3 - Patent

M1 - HK 1110298

ER -

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