Chad Mirkin (Inventor)
Research output: Patent
}
Direct write nano etching method. / Mirkin, Chad (Inventor).
TY - PAT
T1 - Direct write nano etching method
AU - Mirkin, Chad
N1 - filingdate: 2000-1-7 issueddate: 2011-4-8 Status: published attorneydocketnumber: 1998-087-15
PY - 2011/7/8
Y1 - 2011/7/8
M3 - Patent
M1 - HK 1110298
ER -