@inproceedings{0df99dae666c48ed8aea1f4c185ce97e,
title = "Direct-write scanning probe lithography: Towards a desktop fab",
abstract = "Massively parallel scanning-probe based methods have been used to address the challenges of nanometer to millimeter scale printing for a variety of materials and mark a step towards the realization of a {"}desktop fab.{"} Such tools enable simple, flexible, high-throughput, and low-cost nano- and microscale patterning, which allow researchers to rapidly synthesize and study systems ranging from nanoparticle synthesis to biological processes. We have developed a novel scanning probe-based cantilever-free printing method termed polymer pen lithography (PPL), which uses an array of elastomeric tips to transfer materials (e.g. alkanethiols, proteins, polymers) in a direct-write manner onto a variety of surfaces. This technique takes the best attributes of dip-pen nanolithography (DPN) and eliminates many of the disadvantages of contact printing. Various related techniques such as beam pen lithography (BPL), scanning probe block copolymer lithography (SPBCL), and hard-tip, soft spring lithography (HSL) are also discussed.",
keywords = "direct-write, lithography, massively parallel, scanning probe",
author = "Giam, {Louise R.} and Senesi, {Andrew J.} and Xing Liao and Wong, {Lu Shin} and Jinan Chai and Eichelsdoerfer, {Daniel J.} and Wooyoung Shim and Boris Rasin and Shu He and Mirkin, {Chad A.}",
year = "2011",
doi = "10.1117/12.884665",
language = "English (US)",
isbn = "9780819486059",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Micro- and Nanotechnology Sensors, Systems, and Applications III",
note = "Micro- and Nanotechnology Sensors, Systems, and Applications III ; Conference date: 25-04-2011 Through 29-04-2011",
}