Directed fabrication of radially stacked multifunctional oxide heterostructures using soft electron-beam lithography

Zixiao Pan*, Suresh K. Donthu, Nianqiang Wu, Shuyou Li, Vinayak P. Dravid

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

33 Scopus citations

Abstract

A versatile patterning approach based on electron-beam lithography (eBL) and solution deposition, termed soft-eBL, has been developed to fabricate radially stacked heterostructures of multifunctional oxides from their sol precursors. Well-defined nanorings of lead zirconate titanate (PZT) are fabricated on a variety of substrates such as noble metals (e.g., Au), semiconductors (e.g., Si), and oxide single crystals (e.g., SrTiO3), which were previously functionalized with appropriate self-assembled monolayers (SAMs). The undercut in the double-layer eBL resist and substrate functionalization with the SAM treatment play a vital role in the formation of the ring structures. The nanorings are then used as building block "containers" and ring-reservoirs are filled with a second sol (e.g., CoFe2O4) to form radially stacked composite ceramic hetero-structures. The approach presented here does not require either feature alignment to realize heterostructures or the etching of ceramics, and is amenable to a variety of radially stacked composite heterostructures.

Original languageEnglish (US)
Pages (from-to)274-280
Number of pages7
JournalSmall
Volume2
Issue number2
DOIs
StatePublished - Feb 1 2006

Keywords

  • Electron-beam lithography
  • Heterostructures
  • Nanostructures
  • Oxides
  • Self-assembled monolayers

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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