Dissolution of Monocrystalline Silicon Nanomembranes and Their Use as Encapsulation Layers and Electrical Interfaces in Water-Soluble Electronics

Yoon Kyeung Lee, Ki Jun Yu, Enming Song, Amir Barati Farimani, Flavia Vitale, Zhaoqian Xie, Younghee Yoon, Yerim Kim, Andrew Richardson, Haiwen Luan, Yixin Wu, Xu Xie, Timothy H. Lucas, Kaitlyn Crawford, Yongfeng Mei, Xue Feng, Yonggang Huang, Brian Litt, Narayana R. Aluru, Lan Yin* & 1 others John A Rogers

*Corresponding author for this work

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The chemistry that governs the dissolution of device-grade, monocrystalline silicon nanomembranes into benign end products by hydrolysis serves as the foundation for fully eco/biodegradable classes of high-performance electronics. This paper examines these processes in aqueous solutions with chemical compositions relevant to groundwater and biofluids. The results show that the presence of Si(OH)4 and proteins in these solutions can slow the rates of dissolution and that ion-specific effects associated with Ca2+ can significantly increase these rates. This information allows for effective use of silicon nanomembranes not only as active layers in eco/biodegradable electronics but also as water barriers capable of providing perfect encapsulation until their disappearance by dissolution. The time scales for this encapsulation can be controlled by introduction of dopants into the Si and by addition of oxide layers on the exposed surfaces.The former possibility also allows the doped silicon to serve as an electrical interface for measuring biopotentials, as demonstrated in fully bioresorbable platforms for in vivo neural recordings. This collection of findings is important for further engineering development of water-soluble classes of silicon electronics.

Original languageEnglish (US)
Pages (from-to)12562-12572
Number of pages11
JournalACS nano
Volume11
Issue number12
DOIs
StatePublished - Dec 26 2017

Fingerprint

Monocrystalline silicon
Silicon
Encapsulation
dissolving
Dissolution
Electronic equipment
Water
silicon
electronics
water
product development
Oxides
Groundwater
Hydrolysis
ground water
Doping (additives)
Ions
Proteins
hydrolysis
grade

Keywords

  • bioresorbable electronics
  • encapsulation
  • silicon dissolution
  • transient electronics
  • water barrier

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Lee, Yoon Kyeung ; Yu, Ki Jun ; Song, Enming ; Barati Farimani, Amir ; Vitale, Flavia ; Xie, Zhaoqian ; Yoon, Younghee ; Kim, Yerim ; Richardson, Andrew ; Luan, Haiwen ; Wu, Yixin ; Xie, Xu ; Lucas, Timothy H. ; Crawford, Kaitlyn ; Mei, Yongfeng ; Feng, Xue ; Huang, Yonggang ; Litt, Brian ; Aluru, Narayana R. ; Yin, Lan ; Rogers, John A. / Dissolution of Monocrystalline Silicon Nanomembranes and Their Use as Encapsulation Layers and Electrical Interfaces in Water-Soluble Electronics. In: ACS nano. 2017 ; Vol. 11, No. 12. pp. 12562-12572.
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abstract = "The chemistry that governs the dissolution of device-grade, monocrystalline silicon nanomembranes into benign end products by hydrolysis serves as the foundation for fully eco/biodegradable classes of high-performance electronics. This paper examines these processes in aqueous solutions with chemical compositions relevant to groundwater and biofluids. The results show that the presence of Si(OH)4 and proteins in these solutions can slow the rates of dissolution and that ion-specific effects associated with Ca2+ can significantly increase these rates. This information allows for effective use of silicon nanomembranes not only as active layers in eco/biodegradable electronics but also as water barriers capable of providing perfect encapsulation until their disappearance by dissolution. The time scales for this encapsulation can be controlled by introduction of dopants into the Si and by addition of oxide layers on the exposed surfaces.The former possibility also allows the doped silicon to serve as an electrical interface for measuring biopotentials, as demonstrated in fully bioresorbable platforms for in vivo neural recordings. This collection of findings is important for further engineering development of water-soluble classes of silicon electronics.",
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Lee, YK, Yu, KJ, Song, E, Barati Farimani, A, Vitale, F, Xie, Z, Yoon, Y, Kim, Y, Richardson, A, Luan, H, Wu, Y, Xie, X, Lucas, TH, Crawford, K, Mei, Y, Feng, X, Huang, Y, Litt, B, Aluru, NR, Yin, L & Rogers, JA 2017, 'Dissolution of Monocrystalline Silicon Nanomembranes and Their Use as Encapsulation Layers and Electrical Interfaces in Water-Soluble Electronics', ACS nano, vol. 11, no. 12, pp. 12562-12572. https://doi.org/10.1021/acsnano.7b06697

Dissolution of Monocrystalline Silicon Nanomembranes and Their Use as Encapsulation Layers and Electrical Interfaces in Water-Soluble Electronics. / Lee, Yoon Kyeung; Yu, Ki Jun; Song, Enming; Barati Farimani, Amir; Vitale, Flavia; Xie, Zhaoqian; Yoon, Younghee; Kim, Yerim; Richardson, Andrew; Luan, Haiwen; Wu, Yixin; Xie, Xu; Lucas, Timothy H.; Crawford, Kaitlyn; Mei, Yongfeng; Feng, Xue; Huang, Yonggang; Litt, Brian; Aluru, Narayana R.; Yin, Lan; Rogers, John A.

In: ACS nano, Vol. 11, No. 12, 26.12.2017, p. 12562-12572.

Research output: Contribution to journalArticle

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AU - Barati Farimani, Amir

AU - Vitale, Flavia

AU - Xie, Zhaoqian

AU - Yoon, Younghee

AU - Kim, Yerim

AU - Richardson, Andrew

AU - Luan, Haiwen

AU - Wu, Yixin

AU - Xie, Xu

AU - Lucas, Timothy H.

AU - Crawford, Kaitlyn

AU - Mei, Yongfeng

AU - Feng, Xue

AU - Huang, Yonggang

AU - Litt, Brian

AU - Aluru, Narayana R.

AU - Yin, Lan

AU - Rogers, John A

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