Dual Electron Beam Evaporator for the Preparation of Composition-Modulated Structures

H. Q. Yang; H. K. Wong; J. Q. Zheng; J. B. Ketterson; J. E. Hilliard

doi:10.1116/1.572618

Dual Electron Beam Evaporator for the Preparation of Composition-Modulated Structures

H. Q. Yang, H. K. Wong, J. Q. Zheng, J. B. Ketterson, J. E. Hilliard

MRC - Materials Research Center

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

We describe the construction of an UHV evaporator with two electron beam guns and a heated substrate turntable which is used for the preparation of composition-modulated structures (CMS’s). Using a suitably controlled stepping motor, up to 20 different CMS’s can be prepared in the same run. The system has been used to deposit V/Fe CMS’s and preliminary structural measurements indicate the samples are of high quality.

Original language	English (US)
Pages (from-to)	1-4
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	2
Issue number	1
DOIs	https://doi.org/10.1116/1.572618
State	Published - Jan 1984

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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Dual Electron Beam Evaporator for the Preparation of Composition-Modulated Structures

Abstract

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