Abstract
We describe the construction of an UHV evaporator with two electron beam guns and a heated substrate turntable which is used for the preparation of composition-modulated structures (CMS’s). Using a suitably controlled stepping motor, up to 20 different CMS’s can be prepared in the same run. The system has been used to deposit V/Fe CMS’s and preliminary structural measurements indicate the samples are of high quality.
Original language | English (US) |
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Pages (from-to) | 1-4 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 2 |
Issue number | 1 |
DOIs | |
State | Published - Jan 1984 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films