Dual Electron Beam Evaporator for the Preparation of Composition-Modulated Structures

H. Q. Yang, H. K. Wong, J. Q. Zheng, J. B. Ketterson, J. E. Hilliard

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

We describe the construction of an UHV evaporator with two electron beam guns and a heated substrate turntable which is used for the preparation of composition-modulated structures (CMS’s). Using a suitably controlled stepping motor, up to 20 different CMS’s can be prepared in the same run. The system has been used to deposit V/Fe CMS’s and preliminary structural measurements indicate the samples are of high quality.

Original languageEnglish (US)
Pages (from-to)1-4
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume2
Issue number1
DOIs
StatePublished - Jan 1984

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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