Early stages of plasma synthesis of diamond films

R. Meilunas*, M. S. Wong, K. C. Sheng, R. P.H. Chang, R. P. Van Duyne

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

80 Scopus citations


The early stages of diamond film nucleation and growth in a microwave plasma have been studied in detail as a function of important deposition parameters. The influence of the substrate temperature on the diamond nucleation rate, quality, and final film morphology has been elucidated through Raman spectroscopy and scanning electron microscopy measurements. Using transmission infrared spectroscopy and x-ray diffraction, it is found that a carbide layer is initially formed on the substrate prior to the growth of the diamond film. Furthermore, the final film morphology is also a strong function of the plasma starting condition, the gas composition, and the substrate temperature.

Original languageEnglish (US)
Pages (from-to)2204-2206
Number of pages3
JournalApplied Physics Letters
Issue number22
StatePublished - 1989

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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