Effect of forbidden light on subsurface IC imaging

Aydan Uyar, Abdulkadir Yurt, T. Berkin Cilingiroglu, Bennett B. Goldberg, M. Selim ünlü

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Forbidden light, the cone of high-angle light formed above critical angle, plays a critical role in near-interface high numerical aperture imaging. We investigate its effect in subsurface imaging in aplanatic solid immersion microscopy on ICs.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2014
PublisherOptical Society of America (OSA)
ISBN (Electronic)1557522863
StatePublished - Oct 14 2014

Publication series

NameFrontiers in Optics, FiO 2014

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'Effect of forbidden light on subsurface IC imaging'. Together they form a unique fingerprint.

Cite this